Xi'an Kacise Optronics Co.,Ltd.
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KGD - MQ - 536 Infrared Gas Sensor
Product Introduction
The KGD - MQ - 536 Infrared Gas Sensor is based on Non - Dispersive Infrared (NDIR) technology. It can accurately measure gases such as WF6, CF4, SF6, NF3, and CO2 generated in semiconductor applications. It is compatible with common pre - set dimensions, flanges, and communication protocols within equipment. It can be used for endpoint detection in semiconductor deposition and cleaning processes, as well as terminal detection for chamber cleaning, which helps reduce cleaning time, cut costs, and increase production.
Product Features
Technical Parameters
| Parameter | Details |
| Detection Principle | NDIR |
| Detected Gases | WF6, CF4, SF6, NF3, CO2 |
| Measuring Range | 1 - 264ppm (0 - 200mTorr) |
| Repeatability | ±0.5% |
| Linearity | ±1%F.S. |
| Detection Limit | 1ppm |